Region of Operation of Mosfet
Region of Operation of Mosfet
OPERATION OF
MOSFET
1. ACCUMULATION
2. DIFFUSION
3. INVERSION LAYER ( CONDUCTION LAYER )
Representation: For Nmos
1.Substrate Preparation: The process begins with preparing a silicon wafer, which serves as the substrate. The wafer is cleaned
and polished to remove any impurities or surface defects.
2.Oxide Layer Formation: A thin layer of silicon dioxide (SiO2) is grown or deposited on the wafer's surface. This layer acts as
the gate oxide, providing insulation between the gate electrode and the channel region.
3.Photolithography: A layer of photoresist is spin-coated onto the oxide layer. Photolithography is then performed, which
involves exposing the wafer to ultraviolet (UV) light through a photomask. The photomask contains the desired pattern for the
MOSFET's features.
4.Etching: The exposed photoresist is developed, leaving behind a patterned resist layer. Using the resist as a mask, a chemical
etching process is performed to remove the exposed portions of the oxide layer. This step defines the location of the gate region.
5.Gate Electrode Formation: A conductive material, such as doped polysilicon, is deposited on the wafer surface. The polysilicon
layer is then patterned using another round of photolithography and etching, creating the gate electrode structure.
6.Source and Drain Formation: Dopants (impurities) are introduced into the silicon wafer to create heavily doped regions for the
source and drain. This is typically done using ion implantation or diffusion techniques. The gate electrode acts as a mask during
this step, preventing dopants from reaching the channel region.
7.Source and Drain Annealing: The wafer is subjected to a high-temperature annealing process to activate the dopants and repair
any crystal damage caused during the implantation or diffusion steps.
8.Passivation Layer Deposition: A passivation layer, usually made of silicon nitride (Si3N4), is deposited on top of the wafer to
protect the underlying components and provide electrical insulation.
9.Contact Formation: Openings, called contact windows, are created in the passivation layer to expose the source, drain, and gate
regions. Metal contacts, typically aluminum or copper, are deposited and patterned in these openings to establish electrical
connections with the underlying regions.
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